According to the US "RAYTHEON TECHNOLOGY TODAY 2012 ISSUE 1", the next-generation radar, communication and electronic warfare systems, especially those using high-power GaN-based RF, will benefit from advanced thermal management methods to remove the effects generated by these systems. A lot of heat. Among the materials used in the semiconductor industry, diamond has the highest thermal conductivity, which is three times that of silver, and the optical quality of diamond produced by Raytheon's chemical vapor deposition process has a higher thermal conductivity. Raytheon's diamond is synthesized by chemical vapor deposition in the presence of methane and hydrogen under microwave plasma irradiation. The diamond plasma produced by the microwave plasma chemical vapor deposition process has the highest quality. Other methods, such as hot filament chemical vapor deposition, produce diamonds of low quality, which have low thermal conductivity due to the doping of impurities in the hot filament. Raytheon's diamond deposition reactor is reported to be capable of producing 5 inch diameter diamond parts. The role of diamonds in Raytheon is primarily thermal management, especially the dissipation of large thermal loads from high-power devices such as gallium nitride high electron mobility field-effect transistors, because high junction temperatures can degrade RF device performance and reduce Its reliability. The usual practice of lowering the temperature is to increase the pitch and reduce the power density, but these two methods increase the size and cost of the monolithic microwave integrated circuit and reduce the output power. The new solution developed by Raytheon is to integrate diamond directly into the device structure, greatly improving the heat transfer capability of the substrate and thus improving the power handling capability.
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